| 10.18100 % | Cascade Investment, L.L.C. | 29,178,741 | -2,006,813 | 3/11/2025 |
| 8.56770 % | The Vanguard Group, Inc. | 24,555,016 | 247,018 | 6/30/2025 |
| 4.22873 % | BlackRock Institutional Trust Company, N.A. | 12,119,543 | -495,789 | 6/30/2025 |
| 3.90926 % | State Street Investment Management (US) | 11,203,951 | -69,508 | 6/30/2025 |
| 1.91191 % | Geode Capital Management, L.L.C. | 5,479,529 | 22,986 | 6/30/2025 |
| 1.82067 % | Bill & Melinda Gates Foundation Trust | 5,218,044 | 0 | 6/30/2025 |
| 1.64391 % | Wellington Management Company, LLP | 4,711,445 | -50,988 | 6/30/2025 |
| 1.48808 % | Aristotle Capital Management, LLC | 4,264,842 | -100,416 | 6/30/2025 |
| 1.44487 % | Pictet Asset Management Ltd. | 4,140,993 | 51,767 | 6/30/2025 |
| 1.09755 % | Norges Bank Investment Management (NBIM) | 3,145,575 | 920,419 | 6/30/2025 |
| 1.03028 % | BlackRock Investment Management (UK) Ltd. | 2,952,789 | 91,609 | 6/30/2025 |
| 1.02878 % | BlackRock Asset Management Ireland Limited | 2,948,474 | -365,344 | 6/30/2025 |
| 0.90008 % | Morgan Stanley Smith Barney LLC | 2,579,620 | 352,036 | 6/30/2025 |
| 0.86832 % | RBC Capital Markets Wealth Management | 2,488,601 | 8,995 | 6/30/2025 |
| 0.78001 % | Fidelity Management & Research Company LLC | 2,235,510 | 224,183 | 6/30/2025 |
| 0.77087 % | Franklin Advisers, Inc. | 2,209,327 | 2,793 | 6/30/2025 |
| 0.73146 % | Legal & General Investment Management Ltd. | 2,096,360 | -88,305 | 6/30/2025 |
| 0.68473 % | Amundi Asset Management, SAS | 1,962,441 | 98,996 | 6/30/2025 |
| 0.67652 % | Invesco Capital Management LLC | 1,938,917 | -66,941 | 6/30/2025 |
| 0.67552 % | Northern Trust Investments, Inc. | 1,936,054 | -74,133 | 6/30/2025 |
| 0.65868 % | Union Investment Privatfonds GmbH | 1,887,787 | 65,580 | 6/30/2025 |
| 0.63673 % | Mirova US LLC | 1,824,872 | -227,931 | 9/30/2025 |
| 0.58091 % | Brown Advisory | 1,664,888 | -41,701 | 6/30/2025 |
| 0.57967 % | Swedbank Robur Fonder AB | 1,661,320 | 115,344 | 9/30/2025 |
| 0.57669 % | Nordea Funds Oy | 1,652,797 | 39,795 | 9/30/2025 |
| 0.56793 % | BofA Global Research (US) | 1,627,675 | 116,461 | 6/30/2025 |
| 0.55516 % | JP Morgan Asset Management | 1,591,096 | 1,304,956 | 6/30/2025 |
| 0.51176 % | Charles Schwab Investment Management, Inc. | 1,466,695 | 11,060 | 6/30/2025 |
| 0.50788 % | Vontobel Asset Management, Inc. | 1,455,598 | -304,864 | 9/30/2025 |
| 0.49412 % | UBS Financial Services, Inc. | 1,416,152 | -135,025 | 6/30/2025 |
| 0.48996 % | Capital Research Global Investors | 1,404,226 | -32,392 | 6/30/2025 |
| 0.48351 % | American Century Investment Management, Inc. | 1,385,750 | -9,742 | 6/30/2025 |
| 0.47848 % | Goldman Sachs Asset Management, L.P. | 1,371,333 | -787,975 | 6/30/2025 |
| 0.46573 % | UBS Asset Management (UK) Ltd. | 1,334,783 | 10,545 | 6/30/2025 |
| 0.45812 % | Nuveen LLC | 1,312,972 | 8,987 | 6/30/2025 |
| 0.45406 % | Parametric Portfolio Associates LLC | 1,301,343 | 42,204 | 6/30/2025 |
| 0.43482 % | Envestnet Asset Management, Inc. | 1,246,186 | -14,627 | 6/30/2025 |
| 0.42862 % | Allianz Global Investors GmbH | 1,228,418 | 177,036 | 6/30/2025 |
| 0.41947 % | Winslow Capital Management, LLC | 1,202,208 | 217,856 | 6/30/2025 |
| 0.41221 % | Atlanta Capital Management Company, L.L.C. | 1,181,382 | -43,646 | 6/30/2025 |
| 0.40593 % | AllianceBernstein L.P. | 1,163,404 | -39,464 | 6/30/2025 |
| 0.40300 % | Wells Fargo Advisors | 1,154,984 | -41,689 | 6/30/2025 |
| 0.39705 % | UBS Asset Management (Americas) LLC | 1,137,946 | -112,075 | 6/30/2025 |
| 0.38364 % | UBS Asset Management (Switzerland) | 1,099,499 | 268,333 | 6/30/2025 |
| 0.36271 % | Qube Research & Technologies Ltd | 1,039,541 | -138,551 | 6/30/2025 |
| 0.35834 % | First Trust Advisors L.P. | 1,027,012 | -15,216 | 6/30/2025 |
| 0.35811 % | BlackRock (Netherlands) B.V. | 1,026,335 | -81,304 | 6/30/2025 |
| 0.35366 % | Schroder Investment Management Ltd. (SIM) | 1,013,586 | -47,402 | 6/30/2025 |
| 0.35210 % | U.S. Bancorp Asset Management, Inc. | 1,009,118 | -31,754 | 6/30/2025 |
| 0.31964 % | J.P. Morgan Securities LLC | 916,095 | 747,675 | 6/30/2025 |
| 0.31686 % | Luther King Capital Management Corp. | 908,118 | -6,391 | 6/30/2025 |
| 0.31236 % | Managed Account Advisors LLC | 895,229 | -57,659 | 6/30/2025 |
| 0.30963 % | Arrowstreet Capital, Limited Partnership | 887,403 | -30,468 | 6/30/2025 |
| 0.30664 % | Robeco Institutional Asset Management B.V. | 878,829 | 344,541 | 9/30/2025 |
| 0.29672 % | Mellon Investments Corporation | 850,407 | -21,577 | 6/30/2025 |
| 0.29383 % | Mairs and Power, Inc. | 842,124 | 15,805 | 6/30/2025 |
| 0.28683 % | D. F. Dent & Company, Inc. | 822,056 | -11,372 | 6/30/2025 |
| 0.28658 % | Morgan Stanley Investment Management Inc. (US) | 821,342 | -57,524 | 6/30/2025 |
| 0.28093 % | William Blair & Company, L.L.C. (Research) | 805,156 | -8,977 | 6/30/2025 |
| 0.27719 % | Corient Private Wealth LLC | 794,420 | 3,034 | 6/30/2025 |
| 0.27330 % | State Farm Insurance Companies | 783,284 | -11,800 | 6/30/2025 |
| 0.26961 % | Schweizerische Nationalbank | 772,694 | 54,000 | 6/30/2025 |
| 0.26783 % | Dimensional Fund Advisors, L.P. | 767,609 | -5,878 | 6/30/2025 |
| 0.26357 % | Alecta pensionsförsäkring, ömsesidigt | 755,400 | 0 | 6/30/2025 |
| 0.26212 % | Capital International Investors | 751,231 | 5,647 | 6/30/2025 |
| 0.25864 % | KBC Group NV | 741,253 | 246,237 | 6/30/2025 |
| 0.25379 % | AQR Capital Management, LLC | 727,370 | 389,981 | 6/30/2025 |
| 0.25372 % | Williams Jones Wealth Management LLC | 727,152 | 655 | 6/30/2025 |
| 0.25167 % | JPMorgan Private Bank (United States) | 721,297 | 193,683 | 6/30/2025 |
| 0.24860 % | Boston Management and Research | 712,489 | -2,062 | 6/30/2025 |
| 0.24844 % | ProShare Advisors LLC | 712,023 | -31,106 | 6/30/2025 |
| 0.24831 % | Baillie Gifford & Co. | 711,667 | -16,675 | 9/30/2025 |
| 0.24792 % | APG Asset Management N.V. | 710,546 | 292,055 | 6/30/2025 |
| 0.24399 % | RBC Dominion Securities, Inc. | 699,266 | -11,635 | 3/31/2025 |
| 0.24383 % | Sustainable Growth Advisers, LP | 698,812 | -10,329 | 6/30/2025 |
| 0.23384 % | BlackRock Financial Management, Inc. | 670,197 | 10,240 | 6/30/2025 |
| 0.23353 % | Union Investment Institutional GmbH | 669,295 | 24,800 | 6/30/2025 |
| 0.23336 % | California Public Employees' Retirement System | 668,812 | -52,082 | 6/30/2025 |
| 0.22941 % | Barclays Bank PLC | 657,485 | 266,679 | 6/30/2025 |
| 0.22790 % | Impax Asset Management Ltd. | 653,174 | 27,790 | 6/30/2025 |
| 0.22768 % | Aperio Group, LLC | 652,524 | -33,046 | 6/30/2025 |
| 0.22410 % | Janus Henderson Investors | 642,283 | 604,055 | 6/30/2025 |
| 0.22102 % | SEI Investments Management Corporation | 633,449 | -55,876 | 6/30/2025 |
| 0.21821 % | ClearBridge Investments, LLC | 625,400 | -35,320 | 6/30/2025 |
| 0.21685 % | Invesco Advisers, Inc. | 621,482 | 56,222 | 6/30/2025 |
| 0.21424 % | Sumitomo Mitsui Trust Bank, Limited | 614,020 | 7,584 | 9/30/2025 |
| 0.21362 % | HSBC Global Asset Management (UK) Limited | 612,226 | 2,175 | 6/30/2025 |
| 0.20782 % | Empower Advisory Group, LLC | 595,617 | 10,697 | 6/30/2025 |
| 0.20722 % | Columbia Threadneedle Investments (US) | 593,882 | -29,406 | 6/30/2025 |
| 0.20519 % | National Pension Service | 588,076 | -264,206 | 6/30/2025 |
| 0.19745 % | Voya Investment Management LLC | 565,882 | -5,418 | 9/30/2025 |
| 0.19616 % | Goldman Sachs & Company, Inc. | 562,200 | 31,609 | 6/30/2025 |
| 0.18258 % | Zürcher Kantonalbank (Asset Management) | 523,263 | -32,915 | 6/30/2025 |
| 0.18126 % | Union Investment Luxembourg S.A. | 519,477 | 16,627 | 6/30/2025 |
| 0.18085 % | Northern Trust Global Investments | 518,322 | 9,152 | 6/30/2025 |
| 0.18054 % | Assenagon Asset Management S.A. | 517,417 | 144,702 | 9/30/2025 |
| 0.17595 % | Mitsubishi UFJ Asset Management Co., Ltd. | 504,261 | 30,639 | 6/30/2025 |
| 0.17499 % | Ostrum Asset Management | 501,535 | 5,821 | 6/30/2025 |
| 0.17122 % | Congress Asset Management Company, LLP | 490,710 | -6,338 | 9/30/2025 |
| 0.17121 % | BNY Mellon Asset Management | 490,679 | -88,085 | 6/30/2025 |